Mechanical Engineering Seminar
Gates-Thomas 206
Application of a Particle-Augmented Mixed Lubrication Model to Chemical Mechanical Polishing: Modeling and Experimentation
Elon Terrell,
postdoctoral researcher in mechanical engineering,
Carnegie Mellon University,
"Application of a Particle-Augmented Mixed Lubrication Model to Chemical Mechanical Polishing: Modeling and Experimentation," Elon Terrell, postdoctoral researcher in mechanical engineering, Carnegie Mellon University.
For more information, please contact Maria E. Koeper by phone at 626/395-3385 or by email at [email protected].
Event Series
Mechanical Engineering Seminar
Event Sponsors